Laboratory Space

• Class 1000 microfabrication cleanroom with class 100 lithographic area
• Chemical preparation laboratory
• Coatings and organics laboratory
• THz laboratory
• Electronics Technician support

Fabrication toolsets

• UV Photolithographic patterning
• Thin Film Deposition (metal and insulators)
• High temperature processing (up to 1000°C)
• Dry (plasma) etching toolsets
• Spin coating
• Glove Box systems for wet processing, film deposition and characterisation

Inspection and analytical toolsets

• Scanning electron microscope (SEM)
• Atomic force microscopy suite (AFM)
• Optical microscopes
• FLIR thermal imaging camera
• Stylus Profilometer
• UV-vis-NIR spectrometer
• Microwave Impedance Microscope
• Scanning Internal-Photoemission Microscope

Characterisation

• THz Vector Network Analyzer (VNA) 0.75 THz to 1.1THz
• THz Time-Domain Spectroscopy (TDS) 0.5 THz to 3 THz
• Cascade probe station